Electron microscopes

Our group runs a suite of five electron microscopes; these are primarily used for characterising semiconducting materials and devices, but can also be accessed by other groups in the University. The facility is managed using ULab, a web-based laboratory and equipment management system.

Electron probe microanalysers (EPMAs)

Non-destructive electron beam analysis of composition and properties on the micro-scale

JEOL JXA-8530F field-emission EPMA ***ARRIVING SOON***

  • 4× wavelength-dispersive X-ray (WDX) spectrometers
  • energy-dispersive X-ray (EDX) detector
  • panchromatic cathodoluminescence (CL) imaging

Cameca SX100 tungsten/LaB6 EPMA

  • 3× wavelength-dispersive X-ray (WDX) spectrometers
  • cathodoluminescence (CL) hyperspectral imaging
  • electron beam-induced current (EBIC)
  • More information and booking

Scanning electron microscopes (SEMs)

Imaging and measurements on the nano- to micro-scale

FEI Quanta 250 field-emission environmental SEM

  • Oxford Instruments 150 mm2 EDX silicon drift detector
  • Oxford Instruments electron backscatter diffraction (EBSD) detector
  • cathodoluminescence (CL) hyperspectral imaging
  • backscatter, forescatter and wet-STEM detectors
  • electron beam-induced current (EBIC)
  • More information and booking

FEI Sirion 200 field-emission SEM

  • forescatter detector for electron channelling contrast imaging (ECCI)
  • Medipix direct electron detector array for EBSD
  • electrostatic beam blanker
  • More information and booking

JEOL JSM-IT100 InTouchScope SEM

FEI Quanta 250 field emission environmental scanning electron microscope

FEI Sirion 200 field emission scanning electron microscope

Summary of instruments and their capabilities

MakeModelTypeElectron
gun
Spatial
resolution
X-ray
microanalysis
Low-
vacuum
Cathodo-
luminescence
Extras
FEISirion 200SEMField emission✓✓✓✓ECCI, EBIC
FEIQuanta 250ESEMField emission✓✓✓✓✓✓
(EDX)
✓ (UV+vis)EBSD, ECCI
JEOLJSM-IT100SEMThermionic W✓✓✓
(EDX)
CamecaSX100EPMAThermionic W/LaB6✓✓✓✓
3×WDX
✓ (vis)EBIC
JEOLJXA-8530FEPMAField emission✓✓✓✓✓✓✓
4×WDX, EDX
✓ (UV+vis)Coming soon...