Electron microscopes
Our group runs a suite of five electron microscopes; these are primarily used for characterising semiconducting materials and devices, but can also be accessed by other groups in the University. The facility is managed using ULab, a web-based laboratory and equipment management system.
Electron probe microanalysers (EPMAs)
Non-destructive electron beam analysis of composition and properties on the micro-scale
JEOL JXA-8530F field-emission EPMA
- 4× wavelength-dispersive X-ray (WDX) spectrometers
- energy-dispersive X-ray (EDX) detector
- panchromatic cathodoluminescence (CL) imaging
- More information and booking
Cameca SX100 tungsten/LaB6 EPMA
- 3× wavelength-dispersive X-ray (WDX) spectrometers
- cathodoluminescence (CL) hyperspectral imaging
- electron beam-induced current (EBIC)
- More information and booking
Scanning electron microscopes (SEMs)
Imaging and measurements on the nano- to micro-scale
FEI Quanta 250 field-emission environmental SEM
- Oxford Instruments 150 mm2 EDX silicon drift detector
- Oxford Instruments electron backscatter diffraction (EBSD) detector
- cathodoluminescence (CL) hyperspectral imaging
- backscatter, forescatter and wet-STEM detectors
- electron beam-induced current (EBIC)
- liquid nitrogen cryo stage
- More information and booking
FEI Sirion 200 field-emission SEM
- forescatter detector for electron channelling contrast imaging (ECCI)
- Medipix direct electron detector array for EBSD
- electrostatic beam blanker
- More information and booking
JEOL JSM-IT100 InTouchScope SEM
- 3 nm spatial resolution
- integrated EDX detector
- low-vacuum capability for insulating samples
- simple to use
- More information and booking
FEI Quanta 250 field emission environmental scanning electron microscope
FEI Sirion 200 field emission scanning electron microscope
Summary of instruments and their capabilities
| Make | Model | Type | Electron gun | Spatial resolution | X-ray microanalysis | Low- vacuum | Cathodo- luminescence | Extras |
|---|---|---|---|---|---|---|---|---|
| FEI | Sirion 200 | SEM | Field emission | ✓✓✓✓ | ✗ | ✗ | ✗ | ECCI, EBIC |
| FEI | Quanta 250 | ESEM | Field emission | ✓✓✓✓ | ✓✓ (EDX) | ✓ | ✓ (UV+vis) | EBSD, ECCI |
| JEOL | JSM-IT100 | SEM | Thermionic W | ✓✓✓ | ✓ (EDX) | ✓ | ✗ | |
| Cameca | SX100 | EPMA | Thermionic W/LaB6 | ✓ | ✓✓✓✓ 3×WDX | ✗ | ✓ (vis) | EBIC |
| JEOL | JXA-8530F | EPMA | Field emission | ✓✓ | ✓✓✓✓✓ 4×WDX, EDX | ✗ | ✓ (UV+vis) |